Capacitance-type inertial detecting device

摘要

An inertial detecting device for detecting a change in capacitance of a sensor element caused by inertial force includes a displaceable unit. The displaceable unit includes a movable mass member which is displaceable in the direction of an inertial force and is supported in a space by a pair of beams fixed on the substrate. At least one pair of detection units for detecting the displacement of the displaceable unit are provided on the substrate. The detection unit includes a drive unit and a pair of sensing electrodes which are disposed opposite to the displaceable unit. Any gap can be freely set between the sensing electrode and the movable mass member, thereby changing the sensitivity of the detecting device in a wide range.