ION GENERATOR, ITS MANUFACTURING METHOD AND USING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a compact ion generator which uses low voltage to generate ions and uses a small number of components. SOLUTION: The ion generator of this invention comprises an electric insulating substrate and a plate electrode on the electric insulating substrate. The plate electrode comprises a central electrode and a peripheral electrode which surrounds the central electrode and is opposed to the central electrode. Either of the opposing central electrode or peripheral electrode has a projected electrode which is projected toward the opposing electrode. The electric insulating substrate has through-holes for supplying air to a gap between the central electrode and the peripheral electrode and electrical wiring which is connecting them. COPYRIGHT: (C)2006,JPO&NCIPI