发明名称 |
METHOD AND APPARATUS FOR TWO DIMENSIONAL ASSEMBLY OF PARTICLES |
摘要 |
<p>A method and apparatus (10) for making thin layers from particles, wherein the particles are deposited on a carrier fluid flowing by gravity along a ramp (12) leading to a dam (18). The particles are held back at the bottom of the ramp (12), thereby causing the particles to be piled up one against the other in a monolayer configuration.</p> |
申请公布号 |
EP1503870(B1) |
申请公布日期 |
2006.02.08 |
申请号 |
EP20030722143 |
申请日期 |
2003.05.12 |
申请人 |
NANOMETRIX INC. |
发明人 |
PICARD, GILLES;SCHNEIDER, JUAN |
分类号 |
B05D1/20;B05D1/30;B01D69/12;B05C3/18;B05D1/00;B05D7/00;G11B5/842;H01L21/28;H01L23/498;H01L29/51 |
主分类号 |
B05D1/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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