| 摘要 |
PROBLEM TO BE SOLVED: To provide a clean room which can be inexpensively constructed and operated by maximally effectively using air that has been cleaned once. SOLUTION: The clean room 12 has a first clean chamber 13 managed at cleanliness of a high degree, and a second clean chamber 14 with cleanliness equivalent to or less by comparison to the first clean chamber 13. It is composed such that a ceiling chamber 13a receiving air of predetermined cleanliness is provided in a ceiling of the first clean chamber 13, air is passed through a first filter 16A provided in a ceiling part 13c and sent into the first clean chamber 13, an intake part 18a of a communication air supply passage 18 is attached to a rear face of a ventilation floor part 13d of the first clean chamber 13, and air having passed through the first clean chamber 13 is sent into the second clean chamber 14 through the communication air supply passage 18. COPYRIGHT: (C)2006,JPO&NCIPI
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