| 摘要 |
PROBLEM TO BE SOLVED: To improve the contact condition of a rotary electrode disposed in the inside of a vacuum tank and a feeding mechanism to supply electric power by making contact with the rotary electrode. SOLUTION: This vacuum device is composed of the vacuum tank, the rotary electrode disposed in the inside of the vacuum tank in an electrically insulated condition, and the feeding mechanism to supply electric power by making contact with the rotary electrode. The rotary electrode has a ring shape, and rotates horizontally with respect to the center axis of the ring. The feeding mechanism comprises an electrode member, and is structured so that the electrode member is brought into contact with the rotary electrode on at least one contact surface. COPYRIGHT: (C)2006,JPO&NCIPI
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