| 摘要 |
An electrostatic chuck for preventing warpage of a ceramic layer and cooling gas leakage while providing enhanced electrostatic attraction and an improved detachment performance and its manufacturing method is disclosed. The chuck comprises at least one electrode ( 90, 91, 92 ) located in the middle of the ceramic layer ( 80 ) in its thickness direction, a cooling gas channel ( 81 ) is formed on a surface of the ceramic layer within an outer edge of the electrode and above the electrode, wherein the electrode extends beyond the cooling gas channel. Preferably the electrodes are shaped in the form of two interlocked structures comprising multiple interconnected C-shaped ring portion ( 91 c , 92 c).
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