EQUIPMENT FOR PREVENTING PATICLE OF LOAD-LOCK CHAMBER,申请号KR20040057024-传众专利搜索

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发明名称	EQUIPMENT FOR PREVENTING PATICLE OF LOAD-LOCK CHAMBER
摘要
申请公布号	KR20060008359(A)	申请公布日期	2006.01.26
申请号	KR20040057024	申请日期	2004.07.22
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	CHO, JUNG SIK
分类号	H01L21/02	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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