SUBSTRATE TREATMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a substrate treatment device with a minimized space newly required when installing a mechanism for conveying a substrate in a new treatment unit added to existing combined treatment units.

SOLUTION: The substrate treatment device 1 including combined treatment units 1A and 1B for applying a series of predetermined treatment to a substrate is equipped with a substrate conveyance conveyer 630 for conveying the substrate between a first interface 60 for use in an exposure device provided in the unit 1A and a second interface 61 for use in an exposure device provided in the unit 1B. The conveyer 630 is provided so that at least part of the conveyer 630 is stacked on part of the first interface 60 and the second interface 61.

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