| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray foreign matter inspection apparatus, having a sufficient foreign matter inspection capacity, even if the object to be inspected is partially different in the transmissivity of X-rays by a large amount. SOLUTION: Since the irradiation angle of X-rays allowed to irradiate the object to be inspected can be appropriately set from an X-ray generator, by making it possible to adjust the attaching angle or the like of the X-ray generator corresponding to the object to be inspected, the irradiation angle of X-rays can be appropriately set so as not to be markedly lower than the transmission quantity of X-rays transmitted through the part concerned of the object to be inspected, even if the object to be inspected having a high density part at its end part is inspected. Accordingly, even in the case of the object to be inspected partially different in the transmissivity of X-rays largely, foreign matter can be inspected with high accuracy. COPYRIGHT: (C)2006,JPO&NCIPI
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