| 摘要 |
PROBLEM TO BE SOLVED: To provide a MEMS mirror scanner structure that can realize high-speed scanning equal to or more than a polygon mirror scanner, that aims for example to realize high precision scanning in use for laser printing, and that is in particular intended to optimize the shape, dimension, etc., of a scanning mirror itself. SOLUTION: The high precision and miniaturization can be attained by necessarily enlarging the range of an optical path that needs more as an angle of incidence becomes lower (smaller). In other words, with the angle of incidence in the range of 25-90°in the direction orthogonal to the target surface of emission, the scanning mirror needs to have a ratio of the length (b) in the direction of the oscillation axis to the length (a) in the direction orthogonal to the axis as (a≥b, a:b=(1.0 to 2.0):1), or (a<b, a:b=1:(1.001 to 2)). In addition, a space around the mirror is made smaller in the incidence side and larger in the exiting side, with a light transmitting window shaped asymmetrically in the incidence/exiting sides with respect to the mirror. COPYRIGHT: (C)2006,JPO&NCIPI
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