| 摘要 |
PROBLEM TO BE SOLVED: To improve electric power resistance in a surface acoustic wave element in which an electrode 2 to be an interdigital transducer is formed on a piezoelectric substrate 1. SOLUTION: In this surface acoustic wave element, the electrode 2 on the piezoelectric substrate 1 is configured by sequentially laminating a lower part Ti layer 3, an intermediate metal layer 4 made of Mo, W or alloy composed of these metal, an upper part Ti layer 5 and an upper part conductive layer 6 made of Al or an Al alloy. In such a case, the thickness A of the lower part Ti layer is≥10 and≤30 nm, the thickness B of the intermediate metal layer 4 is≥35 and≤65 nm, and the thickness C of the upper part Ti layer 5 is≥10 and≤30 nm. COPYRIGHT: (C)2006,JPO&NCIPI
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