CONTACT TERMINAL, ITS MANUFACTURING METHOD, PROBE CARD EQUIPPED WITH THE CONTACT TERMINAL, AND ELECTRONIC DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a contact terminal having a small number of contactors to be arranged thereto and having a thin connection thickness. SOLUTION: The contact terminal, used for connecting to electrodes of a semiconductor package, has contactors contacting with the electrodes of the package; substrate electrodes holding the contactors at their top parts; and a substrate disposing the substrate electrodes thereon. Each of the contactors has a spring structure to be deformed depending on a shape of each electrode of the package by being contacted with the electrode. Each of the substrate electrode has a cavity or a groove at its center so as to allow the spring of the contactor stroke, or to allow the electrode of the package being inserted into the substrate electrode. COPYRIGHT: (C)2006,JPO&NCIPI