| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a high precision laser machining apparatus, which is miniaturized and has a light weight by preventing a transfer stage of a material to be worked from getting gigantic. <P>SOLUTION: In this laser machining apparatus which irradiates the laser beam generated by a laser generator 1 to a designated point of the material 3 and machines the material by moving the irradiation point, the laser machining apparatus is characterized in that a part or the whole of the laser generator 1 is installed on transfer members 40, 50, 60 movable to the material to be worked 3. As a part or the whole of the laser generator is installed on the transfer member movable to the material to be worked, a stroke of the transfer member has such a size as to cover only the size of the material so that it can prevent the transfer member from getting gigantic and improve positioning accuracy in transferring. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
