| 发明名称 |
A BRUSH ASSEMBLY APPARATUS |
| 摘要 |
A semiconductor processing system, such as a system for scrubbing both sides of a wafer at the same time, that includes a brush box containment apparatus for use with highly-acidic or other volatile chemical solutions, a roller positioning apparatus (520) and a brush placement device. |
| 申请公布号 |
EP0959719(A4) |
申请公布日期 |
2006.01.11 |
| 申请号 |
EP19970934157 |
申请日期 |
1997.07.08 |
| 申请人 |
LAM RESEARCH CORPORATION |
发明人 |
GOCKEL, THOMAS, R.;OLSON, LORIN;RYLE, LYNN;WHITELAW, BRETT, A. |
| 分类号 |
H01L21/304;A46B13/02;B08B1/04;B24B29/02;B24B37/04;H01L21/00 |
主分类号 |
H01L21/304 |
| 代理机构 |
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