发明名称 Method for manufacturing electronic component
摘要 An electronic circuit is manufactured by the following method. Elements are formed on a front surface of a substrate, and then, a recess is formed around each of the elements in the front surface of the substrate. Then, a portion of the substrate is removed from a back surface of the substrate until reaching the bottom of the recess. In the method, the elements are separated at once by removing the portion of the substrate from the back surface, and thus, the elements are manufactured efficiently.
申请公布号 US6984572(B2) 申请公布日期 2006.01.10
申请号 US20030473980 申请日期 2003.10.03
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. 发明人 NAKATANI MASAYA;HAYASHI MICHIHIKO;TAJIKA HIROFUMI
分类号 H01L21/301;G01C19/56;G03C5/00;H01L21/00;H01L21/302;H01L21/304;H01L21/461;H01L21/784 主分类号 H01L21/301
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