| 发明名称 |
WAFER CARRIER HAVING IMPROVED PROCESSING CHARACTERISTICS |
| 摘要 |
A wafer carrier for supporting a plurality of wafers, including a plurality of slots provided in a cradle, the cradle being formed of silicon carbide and having an oxide layer overlying the silicon carbide.
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| 申请公布号 |
KR20060002875(A) |
申请公布日期 |
2006.01.09 |
| 申请号 |
KR20057018160 |
申请日期 |
2005.09.27 |
| 申请人 |
SAINT-GOBAIN CERAMICS AND PLASTICS, INC. |
发明人 |
BUCKLEY RICHARD F.;HAERLE ANDREW G.;CHANG HAN C. |
| 分类号 |
H01L21/00;H01L21/673 |
主分类号 |
H01L21/00 |
| 代理机构 |
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代理人 |
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