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发明名称
Verfahren zur Herstellung einer Metallkarbidschicht und Verfahren zur Herstellung eines Grabenkondensators
摘要
申请公布号
DE10136400(B4)
申请公布日期
2006.01.05
申请号
DE20011036400
申请日期
2001.07.26
申请人
INFINEON TECHNOLOGIES AG
发明人
SELL, BERNHARD;SAENGER, ANNETTE;GUTSCHE, MARTIN;SEIDL, HARALD;MOLL, PETER
分类号
C23C16/32;C23C16/44;C23C16/455;C23C16/56;H01L21/285;H01L21/8242
主分类号
C23C16/32
代理机构
代理人
主权项
地址
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