ETCHANT COMPOSITE FOR SEMICONDUCTOR DEVICE MANUFACTURING AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING ETCHANT COMPOSITE EMPLOYING ETCH BACK PROCESS OF WET ETCH
摘要
申请公布号
KR100542722(B1)
申请公布日期
2006.01.05
申请号
KR19970059486
申请日期
1997.11.12
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KWAK, GYU HWAN;YOON, YEONG HWAN;HWANG, GYEONG SEOK;CHO, HUI GANG
