CHARACTERIZATION AND COMPENSATION OF ERRORS IN MULTI-AXIS INTERFEROMETRY SYSTEM

摘要

In general, in one aspect, the invention features a method that includes monitoring a position of a stage (140) along a first measurement axis and a second measurement axis of a multi-axis interferometry system and determining a position of the stage (140) with respect to another degree of freedom based on the monitored positions along the first and second axes and predetermined information about how the measurement axes deviate from being parallel to one another.