发明名称 Piezoelectric actuator for micro-positioning in a nanometer range consists of a piezoelectric ceramic substrate with four structured electrodes and a back-plate electrode
摘要 <p>Two sectors in an upper semicircle are positively polarized with a plus voltage against an earth (GND), while another two sectors are negatively polarized with a minus voltage against an earth. Two in-phase control signals each with a slowly increasing side of an impulse, e.g. saw-tooth signals, are fed into control channels over a voltage time (U(t)). Independent claims are also included for the following: (A) A multilayered actuator with multiple overlaid piezoelectric actuators; (B) and for an inertia motor with a piezoelectric actuator; (C) and for a step motor with a piezoelectric actuator; (D) and for a method for creating a piezoelectric actuator from a piezoelectric ceramic substrate with four structured electrodes and a back-plate electrode.</p>
申请公布号 DE102004028256(A1) 申请公布日期 2005.12.29
申请号 DE20041028256 申请日期 2004.06.11
申请人 OCTAX MICROSCIENCE GMBH 发明人 RINK, KLAUS
分类号 H01L41/09;H01L41/24;H02N2/04;(IPC1-7):H02N2/04 主分类号 H01L41/09
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