OXIDE FILM FORMING METHOD,申请号EP20020701646-传众专利搜索

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发明名称	OXIDE FILM FORMING METHOD
摘要
申请公布号	EP1372189(A4)	申请公布日期	2005.12.28
申请号	EP20020701646	申请日期	2002.02.28
申请人	TOKYO ELECTRON LIMITED	发明人	HISHIYA, SHINGO;AKIYAMA, KOJI;FURUSAWA, YOSHIKAZU;AOKI, KIMIYA
分类号	H01L29/78;H01L21/316;(IPC1-7):H01L21/316	主分类号	H01L29/78
代理机构		代理人
主权项
地址

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