Linear guide with support element and carriage sliding on support element e.g. for pick and place system of die bonder machine used for automatic assembly of semiconductor chips

摘要

The guide includes a carriage (3) which has two hollow cylinders (4,5) sliding on an air bearing on the support element and a body arranged between them. The support element and the two hollow cylinders of the carriage are separated by a gap to which compressed air can be applied. A linear motor formed from a U-shaped stator (8) and an armature (9) may act as a drive mechanism for the carriage. During operation, heat dissipation occurs in the armature which heats the carriage. In order to maintain changes in the thickness of the gap within predetermined limits, the support element and/or those parts of the carriage whose temperature influence the thickness of the gap, are heated to a predetermined temperature.