METHOD OF FORMING GRAFT PATTERN, GRAFT PATTERN MATERIAL, METHOD OF LITHOGRAPHY, METHOD OF FORMING CONDUCTIVE PATTERN, CONDUCTIVE PATTERN, PROCESS FOR PRODUCING COLOR FILTER, COLOR FILTER AND PROCESS FOR PRODUCING MICROLENS

摘要

A method of forming a graft pattern, in which a high-resolution pattern formation can be realized with the use of a general-purpose exposure machine and in which oil repellent and water repellent regions can be formed with high efficiency; a method of lithography, in which the oil repellent and water repellent graft pattern obtained by the above method is used as an etching stopper; and using the graft pattern formed by the above graft pattern forming method, a method of forming a conductive pattern, process for producing a color filter and process for producing a microlens. There is provided a method of forming a graft pattern, characterized in that graft polymer production regions and nonproduction regions are formed by disposing on a substrate surface a compound having not only a photopolymerization initiation moiety capable of initiating radical polymerization through photo-splitting but also a substrate-binding moiety in a pattern format, bringing it into contact with a radical-polymerizable compound having an oil repellent and water repellent functional group and thereafter conducting whole-surface exposure, or alternatively by causing a compound having not only a photopolymerization initiation moiety capable of initiating radical polymerization through photo-splitting but also a substrate-binding moiety to bind to a substrate, bringing it into contact with a radical-polymerizable compound having an oil repellent and water repellent functional group and thereafter conducting exposure in a pattern format.