| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device and a circuit inspection method capable of employing a relatively low-cost probe test technique even when it has fine narrow pitch terminals. SOLUTION: The terminals 11 located outside are used for ordinary operation and are arranged with a narrow pitch. Consequently, the contact of a probe in a prove test can not be necessarily stabilized. So, there is provided an inspection exclusive use terminal 12 inside the arrangement of the regular terminals 11 on the main surface of a chip 10 for contacting the probe needle in the probe test. The inspection exclusive use terminal 12 is provided with a rate of one for a predetermined number of the regular terminals 11 (three terminals in this case), and hence has a wider contact region than the regular terminal 11. As a result, the constitution is ensured that the contact of the probe needle in the probe test can be stabilized. COPYRIGHT: (C)2006,JPO&NCIPI
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