| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring method and a measuring device capable of measuring accurately the height of a measuring object having a long-range height by utilizing low coherence interferometry, and especially to suppress calculation cost by reducing a memory capacity required at the measuring time or a calculation time. SOLUTION: This micro-height measuring device is constituted so that an absolute value of the difference between both interference light intensities generated from the height difference between an aimed point and a peripheral point is regarded as an absolute value of the difference between both interference light intensities at the aimed point when a stage is moved as long as the height difference portion. Thus, the number of moving times of the stage can be reduced, and the calculation time can be shortened. Since the interference light intensities at the aimed point and the peripheral point are measured, a position where the interference light intensity is sharply changed, namely a peak position of the interference light intensity can be easily detected. Resultantly, even when a sampling point interval at the sampling time is widened by moving the stage and measurement is performed, not only the height of the measuring object but also the surface shape can be measured accurately. COPYRIGHT: (C)2006,JPO&NCIPI
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