METHOD AND DEVICE FOR MEASURING WHETHER A PROCESS KIT PART MEETS A PRESCRIBED TOLERANCE

摘要

A go no-go gauge and method for verifying whether a process kit part used within a plasma chamber of a plasma processing tool has accumulated excessive wear or deposits. The gauge includes a component for verifying whether a dimension of a process kit part feature violates a prescribed size tolerance, the violation indicating that the process kit part has accumulated excessive wear or deposits.