| 摘要 |
PROBLEM TO BE SOLVED: To detect vibration conditions of a plurality of movable operators without causing deterioration in mirror surface precision and reduction in natural frequency caused by an increase in the mass. SOLUTION: In an optical deflector, the plurality of the movable operators are serially connected by a plurality of twisted springs and a detecting means is provided to detect at least one of the movable operators, on which reflection mirrors are not formed, among the plurality of the movable operators. COPYRIGHT: (C)2006,JPO&NCIPI
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