MICRO-LENS STRUCTURE AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a micro-lens structure which has fine size and a fine pitch and has highly accurate lens shape and to provide the manufacturing method of the micro-lens with which the micro-lens structure can be manufactured at low cost and with high reproducibility without using processes of a thermal flow and an etch-back and to provide a silicon structure having these micro-lenses and to provide a micrmachine using the slicon structure. SOLUTION: This micro-lens structure is a micro-lens structure which has a micro-lens on the surface of a silicon substrate and it is characterized in that the surface of the silicon substrate of the micro-lens formation part is formed into a recess and the surface of the silicon substrate is formed by allowing boron to be spread on the surface other than the recess at density higher than that in the recess and, moreover, the boron is spread at density equal to or higher than 1×1019atom/cm3. COPYRIGHT: (C)2006,JPO&NCIPI