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发明名称
Method of manufacturing a diffraction grating
摘要
申请公布号
EP1420274(B1)
申请公布日期
2005.11.23
申请号
EP20040002766
申请日期
1999.12.28
申请人
AGENCY OF INDUSTRIAL SCIENCE AND TECHNOLOGY
发明人
KINTAKA, KENJI;NISHII, JUNJI;TOHGE, NOBORU
分类号
G02B5/18;(IPC1-7):G02B5/18;G03H1/18
主分类号
G02B5/18
代理机构
代理人
主权项
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