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经营范围
发明名称
ALD-reaktori
摘要
申请公布号
FI20055612(A0)
申请公布日期
2005.11.17
申请号
FI20050005612
申请日期
2005.11.17
申请人
BENEQ OY,
发明人
SOININEN,PEKKA;KETO,LEIF
分类号
C23C;C23C16/455;(IPC1-7):C23C
主分类号
C23C
代理机构
代理人
主权项
地址
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