发明名称 NON-UNIFORMLY DOPED HIGH-VOLTAGE DRAIN-EXTENDED TRANSISTOR, AND MANUFACTURING METHOD OF SAME
摘要 PROBLEM TO BE SOLVED: To realize a manufacturing method of drain-extended transistor with the low possibility of high voltage breakdown, and to provide a transistor which does not need to have another step added to the present process. SOLUTION: In an embodiment of the present invention, a transistor (100) is provided. The transistor (100) comprises a doped semiconductor substrate (105) and a gate structure (110) on the semiconductor substrate, and the gate structure (110) has a gate corner (125). Moreover, the transistor (100) includes a drain diffusion well (115), surrounded by the doped semiconductor substrate (105). The drain diffusion well (115) has a dopant type, which has dopant type opposite to that of the doped semiconductor substrate (105). In addition, the drain diffusion well (115) has lightly-doped regions (145) between heavily-doped regions (150), and an end portion of the lightly-doped region (155) substantially coincides with the outer peripheral portion (140) defined by the gate corner (125). Other embodiments of the present invention include the manufacturing method of the transistor and an integrated circuit. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005317967(A) 申请公布日期 2005.11.10
申请号 JP20050127967 申请日期 2005.04.26
申请人 TEXAS INSTR INC <TI> 发明人 PAN SHANJEN;PENDHARKAR SAMEER;JAMES R TODD
分类号 H01L21/8234;H01L21/266;H01L21/336;H01L27/06;H01L27/088;H01L29/06;H01L29/08;H01L29/36;H01L29/423;H01L29/76;H01L29/78;(IPC1-7):H01L29/78;H01L21/823 主分类号 H01L21/8234
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