THIN FILM DEVICE, MANUFACTURING METHOD FOR SAME, LIQUID CRYSTAL DISPLAY APPARATUS AND ELECTROLUMINESCENCE DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To improve heat resistance and moisture resistance by using a substrate with flexural modulus of not more than 1 GPa. SOLUTION: A thin film device 10 in which a thin film device layer 13 is formed on a plastic substrate (support substrate 11) with the flexural modulus of not more than 1 GPa or a thin film device 20 in which a thin film device layer 22 is formed on a support substrate 21 which is a compound substrate on which a plastic substrate 23 with the flexural modulus of not more than 1GPa and a glass substrate 24 are laminated together, are used for forming a liquid crystal display apparatus or an electroluminescence display apparatus. COPYRIGHT: (C)2006,JPO&NCIPI