PATTERN TRANSFER DEVICE AND PATTERN TRANSFER METHOD

摘要

A pattern transfer device for transferring a protruding/recessed pattern formed on the surface of a transfer die accurately to a transferring article. The pattern transfer device applies the transfer die having a protruding/recessed pattern to the transferring article on a substrate thus transferring the protruding/recessed pattern to the surface of the transferring article. The pattern transfer device is characterized by being provided with a means for pressing the transfer die against the transferring article on the substrate for each of a plurality of different positions.