摘要 |
<P>PROBLEM TO BE SOLVED: To provide an element structure capable of suppressing or preventing effectively crack generation in a gas sensor element having a laminated structure. <P>SOLUTION: A buffer cavity 8 and the first and second cavities 10, 12 are formed so as to be extended with a prescribed width in the element longitudinal direction at the height corresponding to the thickness of a spacer layer 4b. The first partition 18 for partitioning the buffer cavity 8 from a gas introduction port 16 is fixed integrally to the first solid electrolyte layer 4a, and the first diffusion rate determining passage 20 is formed in a slit shape spreading in the element width direction between the first partition 18 and the second solid electrolyte layer 4c. <P>COPYRIGHT: (C)2006,JPO&NCIPI |