发明名称 FABRICATION AND USE OF SUPERLATTICE
摘要 This disclosure relates to a system and method for fabricating and using a superlattice 1600. A superlattice 1600 can be fabricated by applying alternating material layers 1302 and 1304 on a ridge 902 and then removing some of the alternating layers to expose edges 1504 and 1506. These exposed edges 1504 and 1506 can be of nearly arbitrary length and curvature. These edges 1504 and 1506 can be used to fabricate an array 1900 of nano-scale-width curved wires 1902.
申请公布号 WO2005096351(A2) 申请公布日期 2005.10.13
申请号 WO2005US11129 申请日期 2005.03.30
申请人 HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.;KORNILOVICH, PAVEL;MARDILOVICH, PETER;STASIAK, JAMES;THIRUKKOVALUR, NIRANJAN 发明人 KORNILOVICH, PAVEL;MARDILOVICH, PETER;STASIAK, JAMES;THIRUKKOVALUR, NIRANJAN
分类号 C23C4/12;C23C4/18;C30B29/68;G03F7/00;G03F7/40;H01L21/00;H01L21/48;H01L21/768;H05K3/20 主分类号 C23C4/12
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