HIN- UND HERGEHENDE LINEAR POLIERMASCHINE MIT LADBAREM HALTER,申请号DE19996021354T-传众专利搜索

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发明名称	HIN- UND HERGEHENDE LINEAR POLIERMASCHINE MIT LADBAREM HALTER
摘要
申请公布号	DE69921354(T2)	申请公布日期	2005.10.13
申请号	DE19996021354T	申请日期	1999.11.19
申请人	ASM NUTOOL,INC.	发明人	TALIEH, HOMAYOUN
分类号	B24B21/04;B24B37/04;B24B47/04;H01L21/304;(IPC1-7):B24B37/04	主分类号	B24B21/04
代理机构		代理人
主权项
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