| 摘要 |
A laser beam processing machine comprising a chuck table having a workpiece holding surface for holding a plate-like workpiece, a laser beam application means having a condenser for applying a laser beam from the top surface side of the workpiece held on the chuck table to form a focusing point, and a focusing point position adjusting means for moving the focusing point formed by the condenser in a direction perpendicular to the workpiece holding surface, wherein the machine further comprises a height position detection means for detecting the height position of an area to which a laser beam is applied from the condenser of the top surface of the workpiece held on the chuck table, and a control means for controlling the focusing point position adjusting means based on the height position detection signal of the height position detection means.
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