ANNULAR CAPACITIVE PRESSURE SENSOR

摘要

A pressure sensor (10) for measuring a pressure of a process fluid includes a vessel (28), an electrode (50) and a diaphragm (48). The vessel (28) receives the process fluid. The electrode (50) is integral with an inner wall of the vessel (28). The diaphragm (48) extends at least partially over the electrode (50) and is configured to move relative to the electrode (50) in response to the pressure of the process fluid. An electrical capacitance between the electrode (50) and the diaphragm (48) is related to the pressure of the process fluid.