| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum processing apparatus, capable of moving up and down a conveying member of goods to be processed or a goods holder doubling it by a vertically moving mechanism with the use of a bellows, with a low capacity driving part of the vertically moving mechanism, capable of accurately stopping the goods-conveying member in the predetermined position, capable of stopping the goods-conveying memeber with a little shock, and capable of preventing the conveying member from falling or the like at the power failure. SOLUTION: A film forming device (e.g. a vacuum device) comprises at least a counter balance mechanism CB for generating a reaction force for respectively cancelling out a load applied to a drive part (a motor 7 or the like) of the moving vertical mechanism EL when an inner pressure of a processing chamber (a film forming chamber 10) is an inner pressure, when setting a reduced-pressure atmosphere, and a load applied to the driving part when the inner pressure of the film forming chamber 10 is predetermined high pressures (e.g. atmospheric pressure) higher than the inner pressure, when setting the reduced-pressure atmosphere. COPYRIGHT: (C)2006,JPO&NCIPI |
