摘要 |
<P>PROBLEM TO BE SOLVED: To provide a characteristic evaluation method and a characteristic evaluation apparatus for organic materials, which eliminate the influence of interaction between an organic material and a metal interface and the influence caused by deterioration of a film surface of the organic material, and can accuratly evaluate electric properties of the organic material. <P>SOLUTION: Positive voltage v is applied to a transparent electrode of an element sample 3 set in a vacuum container 1 by a power source in a source meter 13, and an electronic gun 2 is set so that electron beams are applied on an organic thin film to be measured. The cathode of the electronic gun 2 is grounded. This applied voltage v is scanned, and the current value from the transparent electrode which varies depending on the respective voltage values is measured by the source meter 13. Further, light beams from a condenser lens system 11 is incident upon the back surface side of the element sample 3 (the side of the transparent substrate), in addition to the application of the electron beams, to obtain the applied voltage-current properties of the organic thin film to be measured when light is applied on the element sample 3. <P>COPYRIGHT: (C)2005,JPO&NCIPI |