| 摘要 |
A surface of a dynamic object such as a polygon mirror is measured to determine configuration. In measuring the surface configuration, a light is emitted onto the surface, and interference stripes are analyzed to determine the surface configuration. In analysis of the interference stripes, a correct sign for the peak frequency is required so as to measure a configuration at a high precision level without much prior preparation. The correct sign is obtained in a substantially improved manner by using a relationship between the object light that has been reflected by an object to be measured and the reference light that has been emitted from the light source.
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