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发明名称
摘要
申请公布号	JP3699851(B2)	申请公布日期	2005.09.28
申请号	JP19990034575	申请日期	1999.02.12
申请人		发明人
分类号	H01L21/205;H01L21/203;H01S5/00;H01S5/028;H01S5/10;(IPC1-7):H01S5/028	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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