| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a probe unit which is superior in dimensional stability and in durability. SOLUTION: The probe unit manufacturing method comprises a process of forming an aperture part in a substrate; a process of forming a sacrificial layer within the aperture part; a process of uniforming the surfaces of the substrate and the sacrificial layer; a process of forming the underlayer of a probe pin; a process of forming a resist pattern, formed with the aperture part corresponding to a beam part of the probe pin on the sacrificial layer on the underlayer; a process of forming the probe pin, by electroplating of nickel content of over 75 weight% and under 84 weight% on the underlayer of a part which does not have the resist formed; a process of removing the resist and an unnecessary underlayer; a process of removing the sacrificial layer; a process of cutting the substrate. COPYRIGHT: (C)2005,JPO&NCIPI
|
