| 摘要 |
PROBLEM TO BE SOLVED: To reduce dispersion of surface treatment (such as etching) in a substrate surface in a dry process using a reactive gas. SOLUTION: A gas-flow straightening member includes at least a flow straightening wall 10 which stays the reactive gas G above the substrate surface. The flow straightening wall 10 comprises a plurality of side walls, and surrounds a space region above the substrate surface by putting a plurality of the side walls in order along the peripheral edge of a substrate. Length of the side walls is set so that a gap may be generated at least at one portion between the side walls which adjoin in a peripheral direction. The gas G which passes through the gap from the space region is constituted so that it may have resistance. COPYRIGHT: (C)2005,JPO&NCIPI
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