发明名称 Polishing composition
摘要 The present invention relates to a polishing composition containing an aqueous medium and silica particles, wherein the silica particles in the polishing composition has a zeta potential of from -15 to 40 mV; a method for manufacturing a substrate including the step of polishing a substrate to be polished with a polishing composition containing an aqueous medium and silica particles, wherein the silica particles in the polishing composition has a zeta potential of from -15 to 40 mV; and a method for reducing scratches on a substrate to be polished with a polishing composition containing an aqueous medium and silica particles, including the step of adjusting a zeta potential of silica particles in the polishing composition to -15 to 40 mV. The polishing composition can be favorably used in polishing the substrate for precision parts, including substrates for magnetic recording media such as magnetic discs, optical discs and opto-magnetic discs; photomask substrates; optical lenses; optical mirrors; optical prisms; semiconductor substrates; and the like.
申请公布号 US2005208883(A1) 申请公布日期 2005.09.22
申请号 US20050081560 申请日期 2005.03.17
申请人 KAO CORPORATION 发明人 YOSHIDA HIROYUKI;HONMA YUICHI;TAKASHINA SHIGEAKI;HAGIHARA TOSHIYA
分类号 B24B1/00;B24B7/24;B24B37/04;B24D3/02;C09G1/02;C09K3/14;(IPC1-7):B24D3/02 主分类号 B24B1/00
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