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发明名称
MULTI-LEVEL MEMORY CELL WITH LATERAL FLOATING SPACERS
摘要
申请公布号
EP1576668(A1)
申请公布日期
2005.09.21
申请号
EP20030814101
申请日期
2003.12.18
申请人
发明人
分类号
H01L27/108;H01L21/28;H01L21/8247;H01L27/105;H01L27/115;H01L29/423;H01L29/76;H01L29/788;(IPC1-7):H01L27/108
主分类号
H01L27/108
代理机构
代理人
主权项
地址
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