DRIVE UNIT OF ELECTROSTATIC ACTUATOR AND DRIVE METHOD

摘要

PROBLEM TO BE SOLVED: To provide a drive unit of an electrostatic actuator that does not increase power consumption more than necessary even if an AC voltage is applied, and a drive method. SOLUTION: The electrostatic actuator 20 comprises: an elastic movable body 22 formed with a movable body electrode 21; a fixed board 24 formed with a fixed board electrode 23; and an insulating layer 25 that electrically insulates the fixed board electrode 23 and the movable body electrode 21. The drive unit 10 driving the electrostatic actuator 20 that controls the displacement amount of the elastic movable body 22 by applying the AC voltage between the movable body electrode 21 and the fixed body electrode 23 applies the AC voltage between the movable body electrode 21 and the fixed board electrode 23 while gradually decreasing the amplitude of the AC voltage when decreasing the displacement amount of the elastic movable body 22 (period of B). COPYRIGHT: (C)2005,JPO&NCIPI