| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating liquid supply device that enhances the control accuracy of the amount of discharge of the coating liquid notwithstanding the state of an inner surface of a cylinder, prolongs the life of a sealant and shortens the time required for washing the internal part of the cylinder. SOLUTION: A cylinder pump 3 has a cylinder 31 the bottom part of which is opened, a piston 32 that is capable of acting in the pushing direction and withdrawing direction to the cylinder 31 and a manifold 33 that is integrally mounted on the opening edge of the cylinder 31. The manifold 33 has the perforations with the same diameter of the cylinder 31 and the sealant 34 such as an O ring at a predetermined position of the inner surface. The device is further provided with a coating solution introduction part 35 so that the coating solution can be introduced from the line of the slope of the cylinder. COPYRIGHT: (C)2005,JPO&NCIPI
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