发明名称 Device and method for the application of a sheet-like jointing means onto a contact area of a wafer
摘要 The invention concerns a device and a corresponding method for the jointing of wafers along their corresponding surfaces.
申请公布号 US2005199330(A1) 申请公布日期 2005.09.15
申请号 US20050078136 申请日期 2005.03.11
申请人 THALLNER ERICH 发明人 THALLNER ERICH
分类号 H01L21/20;H01L21/30;H01L21/58;(IPC1-7):B32B31/00 主分类号 H01L21/20
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