Device having capacitor and its manufacture

摘要

A device having a capacitor element includes: an underlying body having a non-orientated first surface; a lower electrode formed on the first surface of the underlying body, the lower electrode containing conductive metal oxide and not containing noble metal, such as LaNiO₃, the conductive metal oxide having a (0 0 1) orientated ABO₃ type pervskite structure; a ferroelectric layer formed on the lower electrode, having a rhombohedral ABO₃ type pervskite structure, the ferroelectric layer being preferentially (0 0 1) orientated in conformity with the orientation of the lower electrode, and an upper electrode formed on the ferroelectric layer.